I don't know why, but I always had a memory of this bad b-movie about these hairy demons being chased by guys with high tech weapons. The only scene I can remember is when one of the guys gets killed the barn and they had a some kind of high tech vehicle.
Sounds a little bit like Critters.
http://www.youtube.com/watch?v=3VkxRD3s5_I
Could also be Critters 2.
no not critters, these things were like man sized hairy creatures. I wish I could remember more of the film, but I saw it so long ago I don't remember anything other than it exists.
possibly "Mutator" or "Watchers" ?
Just a guess, but is there any chance the 'demons' could have been Morlocks? There was a 1978 made-for-TV version of The Time Machine set in modern day (1970's): but they might not have been hairy in that one (sorry: I don't know) It is a modernisation of the story, featuring a 'hi-tech'-looking time machine: silvery, computerised and triangular - that might pass for a space ship (?) Part of the plot involves military weapons.
The entire film is available on Youtube in ten parts.